Quartz wafer is the most common used wafer for semiconductor industry. Due to its high purity, low thermal expansion coefficient, high tensile strength, high transmission rate and unique electronic performance，quartz wafer has been widely applied for chips of PLC plane waveguide spectrometer, MEMS, high-tech semiconductor etc. Besides, quartz wafer features its high temperature resistance, excellent heat conductivity, excellent anti-corrosion performance and sound mechanical performance etc.
Nova have years of experience in providing high precision quartz wafer. Besides standard 4 inch, 5 inch, 6 inch, 8 inch and 12inch wafer, customized quartz wafer is also available for us.
Corning, Nikon, Heraeus are the most frequent quartz material we use. For other materials, please feel free contact our sales engineer and we will be glad to discuss the availability of material options.
Technical parameters of quartz wafer
Property | 4 inch | 5 inch | 6 inch | 8 inch |
12 inch |
Diameter | 100 ± 0.1 mm | 125 ± 0.1 mm | 150 ± 0.1 mm | 200 ± 0.1 mm | 300± 0.1 mm |
Thickness | 500 ± 5 um or customized | 625 ± 5 um or customized | 675 ± 5 um or customized | 725 ± 5 um or customized | 900± 5 um or customized |
Roughness | Ra ≤ 1 nm | Ra ≤ 1 nm | Ra ≤ 1 nm | Ra ≤ 1 nm | Ra ≤ 1 nm |
Warp | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um |
TTV | ≤ 3 um | ≤ 3 um | ≤ 3 um | ≤ 3 um | ≤ 3 um |
Scratch/Dig. | 20/10 | 20/10 | 20/10 | 20/10 | 20/10 |
Chip | ≤ 0.2 mm | ||||
Polish | DSP (Double Side Polished); | ||||
Shape | Round, Flat, Notch | ||||
Bevel | 45°, SEMI Spec; C Shape | ||||
Material | Corning, Nikon, Heraeus | ||||
Remarks | All specifications above can be customized upon your request | ||||
