LiTaO3 wafer

Lithium tantalate (LiTaO3) is a perovskite which possesses unique optical, piezoelectric and pyroelectric properties which make it valuable for nonlinear optics, passive infrared sensors such as motion detectors, terahertz generation and detection, surface acoustic wave applications, cell phones and possibly pyroelectric nuclear fusion.

 

Nova have years of experience of supplying high precision LiTaO3 wafer. Besides standard 2 inch, 3 inch, 4 inch, customized sapphire wafer is also available for us. For other dimension, please feel free contact our sales engineer and we will be glad to discuss the availability of dimension options.

  

Technical Parameters of LiTaO3 wafer

Property

2 inch

3inch

4inch

Diameter

50.8 ± 0.1 mm

100 ± 0.1 mm

150 ± 0.1 mm

Thickness

250 ± 5 um

500 ± 5 um

1000 ± 5 um

or customized

or customized

or customized

Roughness

Ra ≤ 0.3 nm                                   Ra ≤ 0.3nm                              Ra ≤ 0.3nm

Warp

≤ 50um                                           ≤ 50um                                     ≤ 50um

TTV

≤ 10 um                                          ≤ 10um                                     ≤ 10um                                      

Scratch/Dig.

20/10                                              20/10                                        20/10

Chip

≤ 0.2 mm                                        ≤   0.2 mm                                ≤ 0.2 mm                

Polish

DSP (Double Side Polished);

Orientation Flat(OF)

22mm ±2mm   Perpendicular to X ±0.2°

Second Refer.Flat(RF)

10mm±3 mm:   Cw270°±0.5°from

Cw315°±0.5°from

 

Edge Form

Straight,  C Chape

Orientation

X&Z-cut ±0.2°

Remarks

All specifications above can be customized upon   your request